抛光机结构设计

Design and Development of Ultra-Precision Polishing MachineAbstractWith the continuous progress and development of society,in modem optics,we see more andmore plane components that cover the new era of technology,such as laser slicing,gem windows,and so on.Through data analysis,it can be found that the demand for this type of planecomponents is also increasing,and the market prospect is very broad.The biggest problem of sucha plane component is how to solve the two major problems of large diameter and thick wallprocessing difficulty and control accuracy under special requirements,and finally obtain the shapeand position tolerance that fully meets the requirements of flatness and parallelism,and meet thebasic premise of accuracy.At the same time ensure its processing efficiency and surface quality.Combining with the current industrial development status of our country and comparing theprocess performance,this machining process of mechanical polishing can not only ensure thelower roughness of the surface value,but also meet the requirements of high surface accuracy.Inview of these two precision requirements,this paper analyzes several main factors that causemechanical polishing processing quality problems,and also makes a finite element static analysison the structure design of the polishing machine,and designs and develops an ultra-precisionpolishing machine tool based on comprehensive data conclusions..The research plan of this paperis as follows:(1)Research and analysis of the main influencing factors of the low surface accuracy andsurface quality standards of large-size plane components obtained under this processingtechnology;in view of the above problems,the required numerical values for the accuracy ofthe machine tool spindle accuracy and the concentric deviation accuracy of the workpiece rotationare determined.It carried out parameterization requirements to ensure the three modules of disksurface shape measurement,trimming and temperature control;finally determined the basicstructure,main parameters and work flow of the machine tool used in this research and developeda daily work plan.(2)Based on the multi-body theory,several factors that lead to the deviation of the polishingdisc surface accuracy are established,and the elements with a relatively high error ratio and howto solve this problem are analyzed.The above data can be used to control the movement of themachine tool.Unit and assembly are the design basis.(3)Comparing the parameter types and functional standards of the machine tool,the mainfunctional unit is completed by consulting the data design.The polishing disc rotating unit in themain structure uses a structure that combines a hydrostatic bearing with a relatively stable torquedirect drive motor.The temperature control unit uses an internal flow channel water-cooled discsurface.The most important thing is It can ensure the consistency of the temperature in theprocessing area.Through static analysis,it is concluded that the maximum deformation valuesthat can be withstood under the double static load of the polishing disk and the bed are0.81um and 9.18 jm,and the maximum stresses it can support are 5.465 MPa and 0.081 MPa.It